“Smallest in the world excimer laser” – CEX-100™
FEATURES
- ArF – 193nm
- KrF – 248nm
- XeCl – 308nm
- XeF – 351nm
- Compact and Light
- Operational on any side of the housing
- Easy use Commands: Start/STOP, PRR, HV
- Control with external panel or PC
- Internal/External SYNCHRO
- Integrated pulse energy sensor
- Counter of laser pulses
- Integrated pressure meter
- Status reporting
- Air cooling
- One-push-button Gas Refill Module
- Compliant with EMC directives EVS-EN 55022 and EVS-EN61000-4 series
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CEX-100 Specification Table
| Laser Medium | ArF, KrF, XeCl, XeF |
| Wavelength | 193, 248, 308, 351 nm |
| Pulse Energy | 3-5 mJ (depends on the medium) |
| Pulse Repetition Rate | 1-100 Hz |
| Gas life time, laser shots | 105-107 (depends on the medium) |
| Pulse duration | 5 ns |
| Pulse to Pulse stability | 3 % |
| Laser control | External remote control / PC via RS232 |
| Beam dimensions | 3 × 3 mm |
| Power supply | 100…240 VAC, 50…60 Hz |
| Power consumption | 130 W at PRR 100 Hz |
| Dimensions, (L × H × W) | 355 × 232 × 150 mm |
| Weight | 9.2 kg / 20.3 lbs |
