“Smallest in the world excimer laser” – CEX-100™


FEATURES

  • Compact and Light
  • Operational on any side of the housing
  • Easy use Commands: Start/STOP, PRR, HV
  • Control with external panel or PC
  • Internal/External SYNCHRO
  • Integrated pulse energy sensor
  • Counter of laser pulses
  • Integrated pressure meter
  • Status reporting
  • Air cooling
  • One-push-button Gas Refill Module
  • Compliant with EMC directives EVS-EN 55022 and EVS-EN61000-4 series

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Exclusive license of Nemor Technologies

CEX-100 Specification Table

Laser MediumArF, KrF, XeCl, XeF
Wavelength193, 248, 308, 351 nm
Pulse Energy3-5 mJ (depends on the medium)
Pulse Repetition Rate1-100 Hz
Gas life time, laser shots105-107 (depends on the medium)
Pulse duration5 ns
Pulse to Pulse stability3 %
Laser controlExternal remote control / PC via RS232
Beam dimensions 3 × 3 mm
Power supply100…240 VAC, 50…60 Hz
Power consumption130 W at PRR 100 Hz
Dimensions, (L × H × W)355 × 232 × 150 mm
Weight9.2 kg / 20.3 lbs